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Yes customers are buying new tools but they are also higher end new tools that cost more money. Just to give an example a tool the scanned Photomasks 3 years ago cost $1million, the tool that replaced it costs $3million, the tool that replaces that ( the newest and hottest equipment around ) now costs $6Million and the one that is going to replace it in one to two years from now costs $12Million. Plus most fabs contract with KLA-Tencor to maintain their tools after installation which is a long term income stream.
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